Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1: Introduction to Vacuum and Systems

Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.

Author: J. R. Gaines, Matthew Healy
Publisher: Elsevier
Published: 08/01/2024
Pages: 550
Binding Type: Paperback
ISBN: 9780128233924

About the Author
Gaines, J. R.: - J.R. Gaines is the Technical Director of Education for the Kurt J. Lesker Company, (Jefferson Hills, PA). Gaines has more than 40 years of experience in the research, development and commercialization of advanced materials technologies including superconductivity, semiconductors, cryogenics, space simulation, energy generation, energy conversion and storage. His experience includes vacuum systems, thin film deposition, inorganic chemistry, nanotechnology and advanced ceramic processing. He currently develops and delivers the Company's many educational programs through Lesker University teaching events. Prior to joining the Lesker Company, J.R. worked for Lake Shore Cryotronics manufacturing temperature sensors, Superconductive Components, Inc. where he developed a line of ceramic superconductors and superconductive devices, Oak Ridge Micro-Energy where he helped commercialize solid-state thin film batteries, and the Sputtering Target Manufacturing Company where he developed a unique approach for advanced ceramic sputtering targets which was subsequently acquired by the Kurt J. Lesker Company.Healy, Matthew: - Matt Healy has a Ph.D. in Chemistry from Harvard University, a BS in Chemistry from the Massachusetts Institute of Technology, and an MBA from University of Chicago Graduate School of Business. He began his research career as a post-doctoral scientist at the DOE Los Alamos National Laboratory. He was formerly Vice President of Product Management at Pixelligent Technologies, LLC and previously Director of Business Development of Digital Lumens and GE Lighting Division, and Product Line Director at ATMI. He is currently Business Segment Manager at Kurt J. Lesker Company, specializing in materials processing and applications. The Lesker Company is a global scientific equipment manufacturer supplying materials and tools for vacuum-enabled innovation. He has authored 40 publications.